Advcanced Ceramics for Semiconductor Industry

Advanced ceramics have a wide range of applications in the semiconductor industry, such as high-performance substrates, electronic component package, heat sink, and semiconductor production equipment parts, etc. The performance and production efficiency of semiconductor products have been significantly improved compared with traditional products, meeting the needs of the rapid development of the industry.

 

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Properties of Advanced Ceramics

Advanced ceramics , as a kind of non-metallic material with excellent physical and chemical properties, including good electrical insulation performance, high hardness, good wear resistance, high temperature and corrosion resistance, good heat dissipation performance.

 

Q:What types of ceramic materials are commonly used in semiconductor manufacturing?
A:Common ceramic materials used in semiconductor manufacturing include Alumina (Al₂O₃), Silicon Nitride (Si₃N₄), Silicon Carbide (SiC), and Aluminum Nitride (AlN). These materials are chosen for their excellent thermal conductivity, electrical insulation, and chemical stability.

 

Q:What are the typical applications of ceramics in the semiconductor industry?
A:Ceramic components are used in various semiconductor manufacturing processes, including wafer handling, substrate carriers, etching and deposition equipment, and in thermal management solutions. Their high purity and stability under extreme conditions make them ideal for these precision applications.

 

Q:How do ceramic materials contribute to thermal management in semiconductor devices?
A:Ceramic materials like Aluminum Nitride and Silicon Carbide are used in semiconductor devices for their high thermal conductivity. They efficiently dissipate heat, which is critical in preventing overheating and ensuring the reliability and longevity of electronic components.

 

Q:Are ceramic materials used in semiconductor manufacturing resistant to chemical corrosion?
A:Yes, ceramic materials used in semiconductor manufacturing are highly resistant to chemical corrosion. This resistance is essential because semiconductor processing often involves exposure to harsh chemicals and plasma environments where metals and polymers might degrade.

 

Q:Can ceramic components be customized for specific semiconductor applications?
A:Yes, ceramic components can be highly customized to meet the specific needs of semiconductor applications. Customization can include precise machining, specific geometries, and the selection of materials based on thermal, electrical, and mechanical requirements. This ensures that the ceramic parts fit perfectly within the manufacturing equipment and meet the high standards of the semiconductor industry.

 

 

Applications of Advanced Ceramics For Semiconductor Industry

1. Ceramic substrate

Alumina, silicon nitride, aluminum nitride and silicon carbide ceramics have good thermal conductivity, high temperature and corrosion resistance, they can be used to produce substrates, for electronic components and integrated circuit;

 

2. Ceramic wafer tray

Alumina and silicon carbide ceramics have high temperature resistance, and wear resistance, they can be used to produce tray to carry wafer for various process,  such as RTA(Rapid Thermal Annealing), PVD(Physical vapor Deposition), ICP(Inductively Coupled Plasma), CMP(chemical mechanical polish), to get good processing effect and high efficiency;

 

3. Ceramic vacuum chuck

Alumina and silicon carbide ceramics have good finish surface, with strong absorption force when pumping air is applied, also ceramic vacuum chuck have high temperature resistance, and widely used to absorb and transfer wafer during the production process;

 

4. Wafer boat and boat bracket

Silicon carbide and quartz have high temperature resistance and good wear resistance, also the density is low and weight is light, they are suitable to produce wafer boat and boat bracket, to carry wafer for diffusion and oxidation treatment in a diffusion furnace. 

 

5. Diffusion furnace tube

Quartz tube has high temperature resistance and excellent thermal stability, it can be used as diffusion furnace tube, for diffusion and oxidation process of semiconductor wafer wafer.

Process for Customized Request

⩟ Drawing and sample providing

⩟ Production solution and fabrication method evaluation

⩟ Cost calculation and quotation

⩟ Module cost payment

⩟ Sample delivery

⩟ Sample evaluation and confirmation

⩟ Down payment of bulk order 

⩟ Mass production

⩟ Batch product delivery

Support

In addition to current standard products, ATCERA can also customize solution according to the user's application scenarios and using parameters, to provide customers with the most optimized product and service.

FAQ

Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

Absolutely. Our technical team possesses profound knowledge of ceramic materials and extensive experience in product design. We are happy to provide you with material selection advice and product design support to ensure optimal performance for your products.

We do not have a fixed minimum order value requirement. We always focus on meeting our customers' needs, and we strive to provide quality service and products regardless of the order size.

In addition to ceramic products, we also provide a range of additional services, including but not limited to: customized ceramic processing services based on your needs, using blanks or semi-finished blanks produced by yourself; if you are interested in outsourced ceramic packaging and metallization services, please contact us for further discussion. We are always committed to providing you with a one-stop solution to meet your various needs.

Yes, we do. No matter where you are located globally, we can ensure the safe and timely delivery of your order.

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