Quartz Diffusion Furnace Tube Fused Silica Oxidation Furnance Tube

Quartz diffusion furnace tube has one end open, and the other end is closed. There is a gas intake pipe in the center of the closed end, and a flange is on the open end to increase the sealing area, therefore increase the sealing effect. It is one of the core structures of the diffusion furnace, which is used in the diffusion process of semiconductor wafer and solar cell silicon wafer.

Brand:
ATCERA
Item NO.:
AT-SY-XG001

Materials
Quartz
Shapes
Tube
Applications
Semiconductor , Photovoltaic Cell Industry

Inquire Now

Properties of Quartz Diffusion Furnace Tube

Quartz furnace diffusion tube has good light transmittance, high temperature resistance, good corrosion resistance, excellent insulation performance.

It has excellent optical properties,light transmission efficiency is high, also with good high temperature resistance and thermal stability, corrosion resistance, good chemical stability, excellent electrical insulation properties, it plays an irreplaceable role in the production of semiconductor and photovoltaic cells.

Applications of Quartz Oxidation Furnance Tube

Quartz diffusion furnace tube is used in semiconductor wafer and solar cell silicon wafer production.

It is mainly used in the diffusion and oxidation process of semiconductor wafer and solar cell silicon wafer.

Size Chart for Quartz Oxidation Furnance Tube

We are committed to delivering prime fused quartz diffusion furnace tube tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of customized sizes to accommodate your unique requirements.

Drawings and parameter requirements shall be provided if customized design request.

Dimention Tolerance of Quartz Diffusion Furnace Tube
Outer Diameter	Outer diameter(%)	Thickness(%)	Roundness(%)	Maximum Curvature(%)	End face Flatness(mm)	End Face Perpendicularity(mm)
200≤φ＜250	±0.5	±10	±0.5	0.3	±0.1	±0.5
φ≥250	±0.5	±10	±0.5	0.3	±0.1	±0.5

Send Requirements for Custom Design

Drawing of Quartz Oxidation Furnance Tube

Quartz Oxidation Furnance Tube
Item NO.	OD (mm)	ID (mm)	Thickness (mm)	Length (mm)	Quartz's Purity (mm)
AT-SY-XG001	55	50	2.5	1500~2000	99.99
AT-SY-XG002	90	83	3.5	1500~2000	99.99
AT-SY-XG003	200	190	5	2000~3500	99.99
AT-SY-XG004	330	314	8	2000~3500	99.99
AT-SY-XG005	430	410	10	2000~3500	99.99
AT-SY-XG006	550	520	15	2000~3500	99.99

Technical Data of Fused Quartz Materials

Density (g/cm3)	2.2
Flexture Strength (MPa)	48
Elastic Modulus (GPa)	72
Poisson's Ratio	0.14-0.17
Compressive strength (MPa)	1100
Bending strength (MPa)	67
Moh's hardness	5.5~6.5
Maximum working temperature (long-term, ℃)	1100
Maximum working temperature (short-term, ℃)	1350
Thermal conductivity (W/m*K)	1.4
Thermal expansion coefficient (/℃)	5.5*10-7
Specific resistance (Ω*cm)	7*107

*This chart illustrates the standard characteristics of the quartz materials commonly employed in the manufacturing of our quartz products and parts. Please be aware that the attributes of customized quartz products and parts may vary depending on the specific processes involved.

Usage Instructions

Quartz diffusion furnace tube cleaning precautions:

1. Hydrofluoric acid, hydrochloric acid, nitric acid or other combined acids can be used as cleaning reagents, and the concentration of acid shall be controlled within 5%. Pay attention to protection during operation to prevent skin corrosion.

2. Strictly control the pickling time to prevent excessive cleaning or insufficient cleaning of the quartz tube.

3. After pickling is completed, it should be washed with deionized water. No acid shall remain on the inner surface of the tube, so as not to affect the performance.

4. Acid-containing cleaning wastewater can not be discharged directly, it should be discharged only after treatment to meet environmental protection requirements.

Valuable Information

Quartz Diffusion Furnace Tube Packing

Quartz diffusion furnace tubes are carefully packaged in appropriate containers to avoid any potential damage.

Customization Advantages

1. According to your application scenario, analyze the needs, choose the appropriate material and processing plan.

2. Professional team, quick response, can provide solutions and quotations within 24 hours after confirming the demand.

3. Flexible business cooperation mechanism, support at least one piece of quantity customization.

4. Quickly provide samples and test reports to confirm that the product meets your needs.

5. Provide product use and maintenance suggestions to reduce your cost of use.

Ask a Free Quote

Related Blog

Could Hot Press Sintering Be the Future of High-Performance Transparent Ceramic Production?

As a new inorganic nonmetallic material with high performance and multiple functions, transparent ceramics show great application potential in optics, electronics, aerospace and other fields because of its excellent light transmission, high strength, high hardness and good thermal and chemical stability. Among the many methods to prepare transparent ceramics, hot pressing sintering has become one ...

How Does Vacuum Sintering Technology Facilitate the Preparation of Transparent Ceramics?

As a kind of high performance material, transparent ceramics show great application potential in the fields of optical window, laser medium and high temperature wave transmittance materials because of its unique optical transparency and excellent mechanical properties. Among the many methods of preparing transparent ceramics, vacuum sintering technology has become one of the most widely resea...

What Are The Advantages Of Cold Isostatic Pressing In The Preparation Of Transparent Ceramics?

As a kind of high performance material, transparent ceramics show great application potential in optics, electronics, aerospace and other fields because of its excellent light transmission, high hardness, high temperature resistance and other characteristics. However, the preparation process of transparent ceramics is complicated, and the molding technology is one of the key factors to determine i...

Transparent Ceramics: Basic Principle & Process of Dry Pressing Molding Technology

As a new material with excellent optical properties, transparent ceramics have shown great application potential in optical Windows, laser devices, high temperature sensors and other fields. In the process of its preparation, molding technology is one of the key links, which directly affects the performance and quality of the final product. Among the many molding methods, dry pressing has bec...

How Do Sintering Process Parameters Affect The Properties Of Alumina Substrate?

As a high-performance material, alumina substrate has been widely used in electronics, aerospace and new energy fields. The preparation process involves many complicated processes, in which casting and drying process are the key links to ensure the quality of the substrate. In this article, the effects of raw material formula, casting film thickness and sintering process parameters on th...

What Are Future Trends In Alumina Substrate Preparation Process For Enhanced Performance?

Because of its excellent mechanical properties, thermal stability and chemical inertness, alumina substrate has shown wide application potential in electronic packaging, thermal management and high-performance structural parts. The preparation process involves complex process steps, in which casting process, as the core link, plays a decisive role in the performance of the final product. This...

What Are The Key Factors Influencing Alumina Substrate Performance During Preparation?

In the rapidly developing electronics industry, alumina substrate has become an indispensable substrate for electronic components with its excellent insulation properties, chemical stability, high thermal conductivity and good high-frequency characteristics. It not only provides support for electronic components, but also plays a key role in heat dissipation and insulation. However, the prepa...

Why Is Process Optimization Crucial for High-Quality Alumina Substrate Preparation?

The preparation of alumina substrate is a multi-step process with high precision, in which the choice of solvent directly affects the homogeneity of slurry, drying efficiency and physical properties of the final product. The solvent must not only be able to quickly dissolve each component to form a stable slurry, but also need to have rapid volatilization characteristics to ensure efficient d...

How Do Alumina Powder Characteristics Affect Alumina Substrate Casting Process?

In the field of electronics industry, alumina substrate has become an indispensable base material for electronic components because of its excellent insulation, chemical stability, high thermal conductivity and good high-frequency performance. It not only plays the role of support and heat dissipation, but also ensures the insulation performance of electronic components. Alumina casting slurr...

Technological Advancements To Improve Silicon Carbide Substrate CMP Efficiency

With the continuous progress of semiconductor technology, silicon carbide (SiC), as a high-performance material, has shown great application potential in the field of power electronic devices. However, in the preparation process of silicon carbide substrate, surface quality control is particularly critical, especially after thinning, grinding and polishing and other processes to obtain ultra-...

Quartz Cuvette UV Quartz Cuvette

Quartz Transparent Tube Fused Silica Tubing

Quartz Capillary Tube Fused Silica Pipe

Quartz Helical Tube Fused Silica Spiral Tubing

Ultraviolet Fused Quartz Tubes UV Silica Tubing

Filter UV Quartz Tube Fused Silica Tubing UV Filter

Double Walled Quartz Tube Silica Cooling Sleeve Tubing

Quartz Infrared Heating Tube

FAQ

Do you supply the materials unlisted on your website?

Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

Can you aid in material selection & ceramic product design?

Absolutely. Our technical team possesses profound knowledge of ceramic materials and extensive experience in product design. We are happy to provide you with material selection advice and product design support to ensure optimal performance for your products.

Do you have a minimum order value requirement?

We do not have a fixed minimum order value requirement. We always focus on meeting our customers' needs, and we strive to provide quality service and products regardless of the order size.

What services beyond ceramic products do you offer?

In addition to ceramic products, we also provide a range of additional services, including but not limited to: customized ceramic processing services based on your needs, using blanks or semi-finished blanks produced by yourself; if you are interested in outsourced ceramic packaging and metallization services, please contact us for further discussion. We are always committed to providing you with a one-stop solution to meet your various needs.

Do you offer international shipping services?

Yes, we do. No matter where you are located globally, we can ensure the safe and timely delivery of your order.

All FAQs

Send Your inquiry

Contact With Us

Contact With Us

Looking for Video?

Office Hours

Monday to Friday: 9:00 AM - 12:00 PM, 2:00 PM - 5:30 PM

Please note that our office hours are based on Beijing Time, which is eight hours ahead of Greenwich Mean Time (GMT). We appreciate your understanding and cooperation in scheduling your inquiries and meetings accordingly. For any urgent matters or queries outside our regular hours, feel free to contact us via email, and we will get back to you as soon as possible. Thank you for your business, and we look forward to serving you.

Home

Products

contact