Microporous Ceramic Vacuum Chuck Alumina Porous Ceramics for Precision Applications

The electrostatic vacuum chuck leverages the Coulombic force generated between the workpiece (the object under processing) and the electrode with applied voltage to securely adsorb the workpiece. Its principal advantages lie in the uniform distribution of adsorption force across the surface of the wafer, ensuring no warping or deformation occurs. The constant and stable adsorption force guarantees the precision of wafer processing while minimizing contamination and damage to the wafer, making it suitable for high-vacuum environments.

Brand:
ATCERA
Item NO.:
AT-YHL-XP001

Materials
Alumina
Shapes
Plate
Applications
Semiconductor , Photovoltaic Cell Industry

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Properties of Alumina Vacuum Chuck

1. Compatible for use in both atmospheric and vacuum environments.

2. Capable of adsorbing conductors, semiconductors, insulators, and porous materials.

3. Simplified clamping and handling mechanism with low electrostatic adsorption energy consumption.

4. Even distribution of adsorption force, eliminating localized stress during adsorption.

5. Gentle support for large-area thin workpieces, preventing scratches and wrinkles during adsorption.

6. Quick activation and deactivation, with no residual potential on the backside of the object, preventing attraction of surrounding dust.

Ceramic Vacuum Chucks for Semiconductor Industry

Applications of Alumina Microporous Vacuum Chuck

Ideal for vacuum lamination in panel manufacturing, semiconductor chip packaging, microelectronics integrated circuits, precision optical component manufacturing, and solar photovoltaic production.

Size Chart of Alumina Vacuum Chuck

We are committed to delivering optimal alumina vacuum chuck tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of custom sizes to accommodate your unique requirements.

Send Requirements for Custom Design

Please provide the specific application scenarios, dimensions of the ceramic balls, and the required usage parameters if customization requirements needed.

Specification Tolerances:

1. Size Range: 05mm-0800mm

2. Micropore Size: 20-60um

3. Porosity: 30-50%

4. Vacuum Chuck Planar Accuracy: 6-8 inches <3um; 12 inches <5um

Customization Requirements:

1. Provide dimensions, thickness, and shape for 2, 3, 4, 5, 6, 8, 12-inch, and non-standard customizations.

2. Choose from aluminum alloy, stainless steel, ceramic, plastic, and other materials for the base and frame.

Alumina Microporous Vacuum Chuck Square
Item NO.	Length (mm)	Width (mm)	Thickness (mm)	Material
AT-YHL-XP001	305	305	14	316 stainless steel + microporous ceramic (brown)
AT-YHL-XP002	305	305	14	316 stainless steel + microporous ceramic (brown)
AT-YHL-XP003	420	275	20	Aluminum alloy + microporous ceramic
AT-YHL-XP004	450	200	20	SKD61 + porous ceramic
AT-YHL-XP005	520	520	20	Aluminum alloy + microporous ceramic

Alumina Microporous Vacuum Chuck Round
Item NO.	Diameter (mm)	Thickness (mm)	Material
AT-YHL-XP006	174	10	316 stainless steel + microporous ceramic
AT-YHL-XP007	220	35	Only alumina ceramic
AT-YHL-XP008	230	16	316 stainless steel + microporous ceramic
AT-YHL-XP009	239	12	Aluminum alloy + microporous ceramic
AT-YHL-XP010	240	12	316 stainless steel + microporous ceramic
AT-YHL-XP011	286	20	Only alumina ceramic
AT-YHL-XP012	320	16	316 stainless steel + microporous ceramic
AT-YHL-XP013	325	12	Aluminum alloy + microporous ceramic

Technical Data of Aluminium Oxide Materials

Material	99% Alumina (AL2O3)
Thermal Conductivity	24.0w/m.k
Electrical Insulation	≤22.5KV, temperature resistance up to 1600℃
Density	3.83g/cm3
Thermal Expansion Coefficient	*710-6/℃**
Bending Strength (at room temperature)	310MPa
Compressive Strength (at room temperature)	2200MPa
Hardness (Hv)	1650
Fracture Toughness	*4.2MPam1/2**

*This chart illustrates the standard characteristics of the alumina materials commonly employed in the manufacturing of our alumina products and parts. Please be aware that the attributes of customized aluminum oxide products and parts may vary depending on the specific processes involved.

Usage Instructions

1. Do not use positive pressure for blowing. (Customization available for air suspension requirements.)

2. Handle with care, avoiding scratching or impacting the ceramic surface with hard objects to prevent deformation, loss of precision, or cracking.

3. Do not apply heat, as thermal contraction of the aluminum alloy base may lead to ceramic cracking due to pressure.

4. Keep free from contaminants such as oil, glue, and paint. Use in a dust-free and oil-free environment to prevent micropore blockage.

5. Remove dust and dirt from the surface using non-residue adhesive tape or high-pressure water jet.

Valuable Information

Alumina Vacuum Chuck Packing

Alumina vacuum chucks are carefully packaged in appropriate containers to avoid any potential damage.

Customization Advantages

1. According to your application scenario, analyze the needs, choose the appropriate material and processing plan.

2. Professional team, quick response, can provide solutions and quotations within 24 hours after confirming the demand.

3. Flexible business cooperation mechanism, support at least one piece of quantity customization.

4. Quickly provide samples and test reports to confirm that the product meets your needs.

5. Provide product use and maintenance suggestions to reduce your cost of use.

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FAQ

Do you supply the materials unlisted on your website?

Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

Can you aid in material selection & ceramic product design?

Absolutely. Our technical team possesses profound knowledge of ceramic materials and extensive experience in product design. We are happy to provide you with material selection advice and product design support to ensure optimal performance for your products.

Do you have a minimum order value requirement?

We do not have a fixed minimum order value requirement. We always focus on meeting our customers' needs, and we strive to provide quality service and products regardless of the order size.

What services beyond ceramic products do you offer?

In addition to ceramic products, we also provide a range of additional services, including but not limited to: customized ceramic processing services based on your needs, using blanks or semi-finished blanks produced by yourself; if you are interested in outsourced ceramic packaging and metallization services, please contact us for further discussion. We are always committed to providing you with a one-stop solution to meet your various needs.

Do you offer international shipping services?

Yes, we do. No matter where you are located globally, we can ensure the safe and timely delivery of your order.

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