alumina vacuum chuck
alumina vacuum chuck
alumina vacuum chuck
alumina vacuum chuck
alumina vacuum chuck

Microporous Ceramic Vacuum Chuck Alumina Porous Ceramics for Precision Applications

The electrostatic vacuum chuck leverages the Coulombic force generated between the workpiece (the object under processing) and the electrode with applied voltage to securely adsorb the workpiece. Its principal advantages lie in the uniform distribution of adsorption force across the surface of the wafer, ensuring no warping or deformation occurs. The constant and stable adsorption force guarantees the precision of wafer processing while minimizing contamination and damage to the wafer, making it suitable for high-vacuum environments.

  • Brand:

    ATCERA
  • Item NO.:

    AT-YHL-XP001
  • Materials

    Alumina
  • Shapes

    Plate
  • Applications

    Semiconductor , Photovoltaic Cell Industry
alumina vacuum chuck

Properties of Alumina Vacuum Chuck

 

1. Compatible for use in both atmospheric and vacuum environments.

 

2. Capable of adsorbing conductors, semiconductors, insulators, and porous materials.

 

3. Simplified clamping and handling mechanism with low electrostatic adsorption energy consumption.

 

4. Even distribution of adsorption force, eliminating localized stress during adsorption.

 

5. Gentle support for large-area thin workpieces, preventing scratches and wrinkles during adsorption.

 

6. Quick activation and deactivation, with no residual potential on the backside of the object, preventing attraction of surrounding dust.

Ceramic Vacuum Chucks for Semiconductor Industry

Applications of Alumina Microporous Vacuum Chuck

 

 

 

 

 

 

Ideal for vacuum lamination in panel manufacturing, semiconductor chip packaging, microelectronics integrated circuits, precision optical component manufacturing, and solar photovoltaic production.

 

 

 

 

 

Size Chart of Alumina Vacuum Chuck

 

We are committed to delivering optimal alumina vacuum chuck tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of custom sizes to accommodate your unique requirements.

 

Please provide the specific application scenarios, dimensions of the ceramic balls, and the required usage parameters if customization requirements needed.

 

Specification Tolerances:

1. Size Range: 05mm-0800mm

2. Micropore Size: 20-60um

3. Porosity: 30-50%

4. Vacuum Chuck Planar Accuracy: 6-8 inches <3um; 12 inches <5um

 

Customization Requirements:

1. Provide dimensions, thickness, and shape for 2, 3, 4, 5, 6, 8, 12-inch, and non-standard customizations.

2. Choose from aluminum alloy, stainless steel, ceramic, plastic, and other materials for the base and frame.

 

Alumina Microporous Vacuum Chuck Square
Item NO. Length (mm) Width (mm) Thickness (mm) Material
AT-YHL-XP001 305 305 14 316 stainless steel + microporous ceramic (brown)
AT-YHL-XP002 305 305 14 316 stainless steel + microporous ceramic (brown)
AT-YHL-XP003 420 275 20 Aluminum alloy + microporous ceramic
AT-YHL-XP004 450 200 20 SKD61 + porous ceramic
AT-YHL-XP005 520 520 20 Aluminum alloy + microporous ceramic

 

Alumina Microporous Vacuum Chuck Round
Item NO. Diameter (mm) Thickness (mm) Material
AT-YHL-XP006 174 10 316 stainless steel + microporous ceramic
AT-YHL-XP007 220 35 Only alumina ceramic
AT-YHL-XP008 230 16 316 stainless steel + microporous ceramic
AT-YHL-XP009 239 12 Aluminum alloy + microporous ceramic
AT-YHL-XP010 240 12 316 stainless steel + microporous ceramic
AT-YHL-XP011 286 20 Only alumina ceramic
AT-YHL-XP012 320 16 316 stainless steel + microporous ceramic
AT-YHL-XP013 325 12 Aluminum alloy + microporous ceramic

 

Technical Data of Aluminium Oxide Materials

Material 99% Alumina (AL2O3)
Thermal Conductivity 24.0w/m.k
Electrical Insulation ≤22.5KV, temperature resistance up to 1600℃
Density 3.83g/cm3
Thermal Expansion Coefficient 7*10-6/℃
Bending Strength (at room temperature) 310MPa
Compressive Strength (at room temperature) 2200MPa
Hardness (Hv) 1650
Fracture Toughness 4.2MPa*m1/2

 

*This chart illustrates the standard characteristics of the alumina materials commonly employed in the manufacturing of our alumina products and parts. Please be aware that the attributes of customized aluminum oxide products and parts may vary depending on the specific processes involved.

 
 

Usage Instructions

 
 
1. Do not use positive pressure for blowing. (Customization available for air suspension requirements.)
 
2. Handle with care, avoiding scratching or impacting the ceramic surface with hard objects to prevent deformation, loss of precision, or cracking.
 
3. Do not apply heat, as thermal contraction of the aluminum alloy base may lead to ceramic cracking due to pressure.
 
4. Keep free from contaminants such as oil, glue, and paint. Use in a dust-free and oil-free environment to prevent micropore blockage.
 
5. Remove dust and dirt from the surface using non-residue adhesive tape or high-pressure water jet.

Valuable Information

 

Alumina Vacuum Chuck Packing

Alumina Vacuum Chuck Packing

 

 

 

 

Alumina vacuum chucks are carefully packaged in appropriate containers to avoid any potential damage.

 

 

 

 

 

 

 

 

 

 

 

 

Customization Advantages
Customization Advantages

 

 

1. According to your application scenario, analyze the needs, choose the appropriate material and processing plan.

 

2. Professional team, quick response, can provide solutions and quotations within 24 hours after confirming the demand.

 

3. Flexible business cooperation mechanism, support at least one piece of quantity customization.

 

4. Quickly provide samples and test reports to confirm that the product meets your needs.

 

5. Provide product use and maintenance suggestions to reduce your cost of use.

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FAQ

Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

Absolutely. Our technical team possesses profound knowledge of ceramic materials and extensive experience in product design. We are happy to provide you with material selection advice and product design support to ensure optimal performance for your products.

We do not have a fixed minimum order value requirement. We always focus on meeting our customers' needs, and we strive to provide quality service and products regardless of the order size.

In addition to ceramic products, we also provide a range of additional services, including but not limited to: customized ceramic processing services based on your needs, using blanks or semi-finished blanks produced by yourself; if you are interested in outsourced ceramic packaging and metallization services, please contact us for further discussion. We are always committed to providing you with a one-stop solution to meet your various needs.

Yes, we do. No matter where you are located globally, we can ensure the safe and timely delivery of your order.

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