Silicon Carbide Vacuum Chuck

Silicon carbide vacuum chuck surface has small holes or channels, connected to vacuum pump system, when vacuum pump is working, pressure difference will be generated to absorb items, suitable for absorbing thin and light items such as wafers, chips, solar cells, etc.

Brand:
ATCERA
Item NO.:
AT-THG-XP001

Materials
SiC
Shapes
Mechanical Parts
Applications
Semiconductor , Photovoltaic Cell Industry

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Properties of Silicon Carbide Ceramic Vacuum Chuck

1. High wear resistance

Silicon carbide vacuum chuck has high strength and good wear resistance, service life is long, so to reduce the frequency of replacement and use costs.

2. High temperature resistance

The material of the silicon carbide vacuum chuck can be used in a high temperature environment for a long time, to meet the needs of electronics, semiconductors and other industries for production and processing under high temperature environment.

3. Strong adsorption

The surface of silicon carbide vacuum chuck is smooth and has a very strong adsorption force, which can easily absorb and locate the item effectively, and it is convenient and safe to use.

Applications of SiC Vacuum Chuck

Silicon carbide vacuum chuck can be used in chip manufacturing, electronic equipment production, photovoltaic industry, etc.

1. Chip manufacturing

In the semiconductor chip production process, silicon carbide vacuum chuck can be used to absorb and transfer wafer or chip, and ensure that the wafer or chip surface is not scratched and contaminated, and improve production efficiency.

2. Electronic devices

In the process of electronic equipment assembly, silicon carbide vacuum chuck can be used to absorb small electronic parts, for the purpose of transfer and precision positioning.

3. Photovoltaic industry

The silicon carbide vacuum chuck can be used in the production of photovoltaic panels to absorb solar cells and transfer them to a set station.

Size Chart for Silicon Carbide Vacuum Chuck

We are committed to delivering optimal silicon carbide vacuum chucks tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of customized sizes to accommodate your unique requirements.

Send Requirements for Custom Design

Drawing and specification requirement shall be provided if customized design request.

Silicon Carbide Vacuum Chuck Square
Item NO.	L × W × H (mm)	Material
AT-THG-XP001	30530514	316 stainless steel coupled with microporous ceramic
AT-THG-XP002	30530514	316 stainless steel paired with microporous ceramic
AT-THG-XP003	42027520	Aluminum alloy integrated with microporous ceramic
AT-THG-XP004	45020020	SKD61 alloy fused with porous ceramic
AT-THG-XP005	52052020	Aluminum alloy amalgamated with microporous ceramic

Silicon Carbide Vacuum Chuck Round
Item NO.	Dia. × H (mm)	Material (mm)
AT-THG-XP006	174*10	316 stainless steel intertwined with microporous ceramic
AT-THG-XP007	230*16	316 stainless steel combined with microporous ceramic
AT-THG-XP008	239*12	Aluminum alloy blended with microporous ceramic
AT-THG-XP009	240*12	316 stainless steel allied with microporous ceramic
AT-THG-XP010	320*16	316 stainless steel harmonized with microporous ceramic
AT-THG-XP011	325*12	Aluminum alloy interfaced with microporous ceramic

Technical Data of Silicon Carbide Materials

Item		Unit	Index Data
Item		Unit	Reaction-sintered SiC (SiSiC)	Silicon Nitride Bonded With SiC (NBSiC)	Sintered SiCn Without Pressure (SSiC)
SiC Content		%	85	80	99
Free Silicon Content		%	15	0	0
Max. Service Temp.		℃	1380	1550	1600
Density		g/cm3	3.02	2.72	3.1
Porosity		%	0	12	0
Bending Strength	20℃	Mpa	250	160	380
Bending Strength	1200℃	Mpa	280	180	400
Modulus of Elasticity	20℃	Gpa	330	220	420
Modulus of Elasticity	1200℃	Gpa	300	/	/
Thermal Conductivity	1200℃	W/m.k	45	15	74
Coefficient of Thermal Expansion		K-1×10-6	4.5	5	4.1
Vickers Hardness	HV	kg/mm2	2500	2500	2800

*This chart illustrates the standard characteristics of the silicon carbide materials commonly employed in the manufacturing of our SiC products and parts. Please be aware that the attributes of customized silicon carbide products and parts may vary depending on the specific processes involved.

Usage Instructions

1. Check to confirm that there is no crack on the surface of the vacuum chuck. If there is a crack, air may be injected into it, and vacuum adsorption cannot be achieved.

2. Check the vacuum chuck surface finish and flatness to ensure the adsorption capacity.

3. Avoid bumping during installation and use, so as not to damage the vacuum chuck.

4. It is necessary to test the adsorption force of the vacuum chuck when perform commissioning of the production system, and put into use after meeting the requirements.

5. Regularly check the surface of the vacuum chuck, timely clean up debris and dirt, and replace it if any crack or damage.

Valuable Information

Silicon Carbide Ceramic Vacuum Chuck Packing

Silicon carbide vacuum chucks are carefully packaged in appropriate containers to avoid any potential damage.

Customization Advantages

1. According to your application scenario, analyze the needs, choose the appropriate material and processing plan.

2. Professional team, quick response, can provide solutions and quotations within 24 hours after confirming the demand.

3. Flexible business cooperation mechanism, support at least one piece of quantity customization.

4. Quickly provide samples and test reports to confirm that the product meets your needs.

5. Provide product use and maintenance suggestions to reduce your cost of use.

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FAQ

Do you supply the materials unlisted on your website?

Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

Can you aid in material selection & ceramic product design?

Absolutely. Our technical team possesses profound knowledge of ceramic materials and extensive experience in product design. We are happy to provide you with material selection advice and product design support to ensure optimal performance for your products.

Do you have a minimum order value requirement?

We do not have a fixed minimum order value requirement. We always focus on meeting our customers' needs, and we strive to provide quality service and products regardless of the order size.

What services beyond ceramic products do you offer?

In addition to ceramic products, we also provide a range of additional services, including but not limited to: customized ceramic processing services based on your needs, using blanks or semi-finished blanks produced by yourself; if you are interested in outsourced ceramic packaging and metallization services, please contact us for further discussion. We are always committed to providing you with a one-stop solution to meet your various needs.

Do you offer international shipping services?

Yes, we do. No matter where you are located globally, we can ensure the safe and timely delivery of your order.

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