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Silicon carbide wafer boat
Silicon carbide wafer boat
Silicon carbide wafer boat
Silicon carbide wafer boat
Silicon carbide wafer boat

Silicon Carbide Wafer Boat SiC Boat For Wafer Handling

The silicon carbide wafer boat is a key component in semiconductor wafer and photovoltaic cell production equipment, and it is used to carry the wafer boat (or boat bracket) containing the semiconductor wafer or solar silicon wafer into the diffusion furnace for coating treatment.

  • Brand:

    ATCERA

  • Item NO.:

    AT-THG-JZ

  • Materials

    SiC

  • Shapes

    Mechanical Parts

  • Applications

    Semiconductor , Photovoltaic Cell Industry
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Silicon carbide wafer boat

Properties of Silicon Carbide Wafer Boat

 

Silicon carbide wafer boat has high temperature resistance, high bending strength, good thermal shock resistance, good thermal stability, high bearing capacity under high temperature, strong oxidation resistance, without impurity drop.

 

1. Silicon carbide wafer boat is resistant to high temperature, the maximum use temperature can reach to 1600℃, good thermal shock resistance, and the service life is more than 5 years;

 

2. Silicon carbide wafer boat material is high purity, avoiding the introduction of impurities, reducing the pollution of the equipment environment in the process, and can effectively improve product quality;

 

3. Silicon carbide wafer boat has light weight, high strength, high bearing capacity under high temperature, so can reduce the size of the loading system to meet the needs of higher output for single batch production;

 

4. Silicon carbide wafer boat thermal expansion coefficient is very small, similar to LPCVD coating, when applied to LPCVD, greatly extend the maintenance and cleaning cycle.

Applications of SiC Wafer Boat

Applications of SiC Wafer Boat

 

Silicon carbide wafer boat is a key component in photovoltaic cell and semiconductor wafer production equipment, for carrying solar silicon wafer and semiconductor wafer in diffusion furnaces at high temperatures (1000-1300℃)

 

1. Photovoltaic cell manufacturing industry

 

 

2. Semiconductor wafer manufacturing industry

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Customized Design for SiC Wafer Boat

We are committed to delivering optimal silicon carbide wafer boat tailored to your exact specifications. Our dedicated team ensures meticulous adherence to your instructions, striving to exceed customer expectations. Additionally, we offer the flexibility of customized sizes to accommodate your unique requirements.

 

Drawing and specification requirement shall be provided if customized design request.

 

Machining Tolerance:
1. Diameter: ±0.01mm
2. Surfance Roughness:Ra0.5
3. Cylindricity:±0.004mm
4. Concentricity:±0.003mm
5. Parallelism: ±0.002mm

 

 

Send Requirements for Custom Design

 

Customized Design for SiC Wafer Boat

 

 

Technical Data of Silicon Carbide Materials

 

Item Unit Index Data
Reaction-sintered SiC
(SiSiC)		 Silicon Nitride Bonded With SiC
(NBSiC)		 Sintered SiCn Without Pressure
(SSiC)
SiC Content % 85 80 99
Free  Silicon Content % 15 0 0
Max. Service Temp. ℃ 1380 1550 1600
Density g/cm3 3.02 2.72 3.1
Porosity % 0 12 0
Bending Strength 20℃ Mpa 250 160 380
1200℃ Mpa 280 180 400
Modulus of Elasticity 20℃ Gpa 330 220 420
1200℃ Gpa 300 / /
Thermal Conductivity 1200℃ W/m.k 45 15 74
Coefficient of Thermal Expansion K-1×10-6 4.5 5 4.1
Vickers Hardness HV kg/mm2 2500 2500 2800

 

*This chart illustrates the standard characteristics of the silicon carbide materials commonly employed in the manufacturing of our SiC products and parts. Please be aware that the attributes of customized silicon carbide products and parts may vary depending on the specific processes involved.

 

Usage Instructions

 
 
 
1. The silicon carbide wafer boat should be moved with the assistance of special handling tools to prevent violent collision and strong vibration;
 
 
2. Silicon carbide wafer boat should be stored in a dry, dust-free, non-corrosive gas environment to prevent moisture and erosion;
 
 
3. Before using the silicon carbide wafer boat, the appearance inspection should be carried out first to check whether there are defects such as damage, deformation, cracks, etc.
 
 
4. The silicon carbide wafer boat should be regularly maintained, including cleaning, inspection and replacement of damaged parts.
 

Valuable Information

 

SiC Wafer Boat Packing

SiC Wafer Boat Packing

 

 

 

Silicon carbide wafer boats are carefully packaged in appropriate containers to avoid any potential damage.

 

 

 

 

 

 

Customization Advantages
Customization Advantages

 

 

1. According to your application scenario, analyze the needs, choose the appropriate material and processing plan.

 

2. Professional team, quick response, can provide solutions and quotations within 24 hours after confirming the demand.

 

3. Flexible business cooperation mechanism, support at least one piece of quantity customization.

 

4. Quickly provide samples and test reports to confirm that the product meets your needs.

 

5. Provide product use and maintenance suggestions to reduce your cost of use.

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FAQ

Although our primary focus is on advanced ceramic materials such as alumina, zirconia, silicon carbide, silicon nitride, aluminum nitride, and quartz ceramics, we are always exploring new materials and technologies. If you have a specific material requirement, please contact us, and we will do our best to fulfill your needs or find suitable partners.

Absolutely. Our technical team possesses profound knowledge of ceramic materials and extensive experience in product design. We are happy to provide you with material selection advice and product design support to ensure optimal performance for your products.

We do not have a fixed minimum order value requirement. We always focus on meeting our customers' needs, and we strive to provide quality service and products regardless of the order size.

In addition to ceramic products, we also provide a range of additional services, including but not limited to: customized ceramic processing services based on your needs, using blanks or semi-finished blanks produced by yourself; if you are interested in outsourced ceramic packaging and metallization services, please contact us for further discussion. We are always committed to providing you with a one-stop solution to meet your various needs.

Yes, we do. No matter where you are located globally, we can ensure the safe and timely delivery of your order.

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